(ClAlNH)n cluster formation in the gas phase for the chemical vapor deposition of AlN thin films
Xiao-Hong Xu,Hai-Shun Wu,Fu-Qiang Zhang,Cong-Jie Zhang,Zhi-Hao Jin
DOI: https://doi.org/10.1016/S0166-1280(00)00852-6
2001-01-01
Abstract:In this paper, both ab initio and density functional theory methods have been used to predict geometries, electronic states and total energies of (ClAlNH)n (n=1–10) clusters. Harmonic vibrational frequencies for these clusters are given in order to aid in the characterization of the ground states. In addition, the thermodynamic properties of the oligomerization processes (ClAlNH)m→m/n(ClAlNH)n are discussed in detail. These results show that the ground state geometric structures of (ClAlNH)n(n=1–10) clusters are Cs(n=1), D2h(v=2), D3h(n=3), Td(n=4), Cs(n=5), D3d(n=6), Cs(n=7), S4(n=8), D3h(n=9) and C2hn=10) symmetry, respectively. The stabilities of the (ClAlNH)n clusters with even n (n=2, 4, 6, 8, 10) are greater than that with odd n (n=1, 3, 5, 7, 9).