A MEASUREMENT AND ANALYTICAL METHOD FOR THE EFFECTS OF OBJECTIVE LENS ABERRATION ON ITS RESOLUTION

Yibing Shen,Guoguang Yang
1999-01-01
Abstract:Resolution of an objective lens is not only affected by the applied wavelength, coherence degree of the light source and the numerical aperture ( NA ) of the objective lens, but also largely affected by the lens aberration. In this paper, a new method is presented to measure and analyze the overall effects of the lens aberration and manufacturing which will affect the lens resolution . The concept of ' virtual aberration, plate is first introduced in calculating the measured results . Two different lens were measured and calculated, and the exposure experiments on photoresist with these lens showed good agreements of the theoretical calculation and measured results.
What problem does this paper attempt to address?