Interfacial Defects in AlN/W Cofired Substrates

Liang Tongxiang,Zhu Junguo,Wang Yinghua,Li Hengde
DOI: https://doi.org/10.1023/A:1006678805453
1999-01-01
Journal of Materials Science Letters
Abstract:Sintering experiments were conducted to study AlN/W cofired multilayer substrates made by normal commercial procedures. The experiments were done at 1850°C with a heating rate of 5°C min-1 and soaking for 4 h. The linear shrinkage of free sintering W films and AlN free sheets were measured by putting them on smooth AlN ceramic planes and measuring the change in length of the films at different times. Finally, the results obtained were analyzed.
What problem does this paper attempt to address?