MBE flexible technology for HgCdTe manufacturing
Li He,Jianrong Yang,Shanli Wang,Yan Wu.,Weizheng Fang,Qinyue Zhang
1999-01-01
Abstract:The recent preliminary results in developing the MBE technique for HgCdTe are described, and the future challenges are discussed. The results show that the MBE grown HgCdTe exhibits good compositional uniformity, surface morphology, electrical properties as well as compositional reproducibility. A 32×32 focal plane array detector was successfully demonstrated by using MBE HgCdTe.
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