Spatial Investigation of a Large Diameter Surface Wave-Excited Plasma and Its Electromagnetic Mode

CF Wu,S Wu,RJ Zhan
DOI: https://doi.org/10.1088/0022-3727/31/24/001
1998-01-01
Abstract:Investigation of the spatial distribution of plasma parameters has shown that a targe diameter uniform plasma (over 160 mm) can be sustained over a broad pressure range (10-230 Pa) by a surface wave at 2.45 GHz. Optical emissions testify the existence of azimuthal modes of m = 4 at a pressure of 10 Pa and m = 6 at a pressure of 230 Pa. The electric field of the m = 4 mode, on which the plasma distribution strongly depends, has also been studied.
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