Two-step Burnout Technique and Low-Temperature Cofiring of Multilayer Aluminum Nitride Substrates

Y Wu,YC Liu,HP Zhou
DOI: https://doi.org/10.1016/s0254-0584(98)00159-x
IF: 4.778
1998-01-01
Materials Chemistry and Physics
Abstract:A two-step burnout technique has been developed for fabricating multilayer aluminum nitride substrates, which could reduce the residual carbon in the green bodies to a very low level. Thermogravimetry experiments have been carried out to analyze the burnout process and secondary ion mass spectrometry (SIMS) is used to examine the residual carbon, which changed the sintering behavior of AIN ceramics. After burnout, the tungsten-painted substrates are successfully cofired at 1650°C for 4 h. The produced phases and microstructure of the sintered substrates are inspected by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively.
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