A technique of burn-out for low temperature cofired a1n multilayer substrates

Wang Yin,Zhou He-Ping,Liu Yao-Cheng,Miao Wei-Guo
1998-01-01
Abstract:A technique of burn-out for low temperature cofired A1N multilayer substrates was introduced, which consist of high thermal conductivity A1N ceramics and metal W. The effect of the evolution of carbon during burn-out on A1N sintering characteristics and microstructure was studied. The results showed that two-step burn-out process may solve the contradiction between W oxidation and residual carbon.
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