Abstract:Nonlinearity is one of the important factors affecting the positioning accuracy of the macro–micro composite actuator. To improve the positioning accuracy of the driving model of the macro–micro composite actuator, this paper combines the research phenomenon of the nonlinear characteristics of the voice coil motor to model the nonlinear factors that affect the macro-moving part of the macro–micro composite actuator. Firstly, based on analyzing its structure and working principle, the variation law of the magnetic field intensity at the working air gap of the macro-motion part is analyzed by the finite element method, and the driving force model of the macro-motion part is established. Secondly, through the magnetic field simulation analysis, there is a magnetization phenomenon in the mover part, and the static friction model is established. Then, the experimental data are acquired and processed by building the experimental test platform of the actuator, and the variation model of the electromechanical time constant with the macro-motion displacement is established. Then, combined with the Stribeck model and the static friction model, the kinetic model of the macro-motion part is established. Finally, using the least square method identify the parameter model, the results are compared with the experiment. The results show that the magnetic field distribution at the working air gap of the macro-motion part of the macro–micro composite actuator is relatively uniform, but it is related to the macro-motion displacement and the macro-motion coil current. When the macro-motion part of the macro-micro composite actuator starts, the friction model can approximately reflect the change of friction force, the kinetic model of the macro-motion part can reflect the dynamic characteristics of the macro-motion part, and the matching degree is 92.97 %. The research results lay a theoretical and technical foundation for the development of a high-speed and large-stroke positioning controller of the macro-motion micro composite actuator.

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