Deposition and diffusion of Pd on SnO2 thin-film and its effect on gas-sensing property

Tianshu Zhang,Yuping Zeng,Yusheng Shen
1996-01-01
Abstract:A thin-layer of metal Pd was deposited onto the surface of SnO2 thin-film on the Al2O3 substrate in an Ar-atmosphere to prepare the Pd/SnO2 thin-film gas-sensors, and the situation of Pd- deposition and diffusion on the SnO2 thin-film were characterized by means of SEM, AES, and XPS. The measured results show that (1) the Pd deposited on SnO2 thin-films is of a shape of three dimensional cluster, however, after heat treatment (500��C, 4h), the Pd diffuses into the bulk of SnO2 thin film; (2) the Pd/SnO2 thin-film sensors are very sensitive to the reducing-gases (especially CH4), which might be attributed to the existence of a lot of chemically absorbed oxygen (O2 -); (3) the Pd/SnO2 thin-film sensors reach their maximum sensitivity to CH4 at about 165��C, which is quite useful for the gas monitoring/alarming application.
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