Influence of incident field coherence on line focus uniformity

Bin Zhang,Baida L��
1995-01-01
Abstract:The Gaussian-Schell model (GSM) beams have been used to simulated partially coherent light. The intensity distribution of the GSM beams with a different coherent parameter �� focused by a cylindrical lens array system has been studied, meanwhile, the influence of the diffraction and interference effects on irradiation uniformity has been also discussed in detail.
What problem does this paper attempt to address?