Background Formation In The Low-Energy Region In Auger-Electron Spectroscopy

Zejun Ding,Ryuichi Shimizu,Keisuke Goto

DOI: https://doi.org/10.1063/1.357844

IF: 2.877

1994-01-01

Journal of Applied Physics

Abstract:Monte Carlo simulations of cascade processes of secondary electron generation in Si, Cu, and Au have been performed to study the energy distribution of backscattered electrons in the low-energy region. Calculation results show that the characteristic hump appearing in the energy distribution above Si-LVV Auger peak in the EN(E) spectrum can be well described by those electrons ejected from the L shell followed by the cascade process. The shape of EN(E) spectra in the low-energy region is dominated by the directly produced secondary electrons and, hence, strongly correlated with the excitation spectrum Im[-1/epsilon(omega)] for electron generation.