Simultaneous Thickness, Velocity, Density, and Attenuation Measurement of a Thin Layer by Time-Resolved Acoustic Microscopy
Jian Chen,Xiaolong Bai,Keji Yang,Bingfeng Ju,Jianxing Meng
DOI: https://doi.org/10.1121/1.4755238
2012-01-01
The Journal of the Acoustical Society of America
Abstract:An ultrasonic method for simultaneous determination of thickness, velocity, density and attenuation of thin layer using a time-resolved acoustic microscopy is proposed. Reflection from the thin layer is represented as a function of three dimensionless parameters which are determined from the experimentally normal incidence component of the two dimensional reflection spectrum R(θ,ω) derived based on the inversion of V(z,t) technique with time-resolved acoustic microscopy. The thickness of the thin layer is derived from the signals received from the layer itself considering the geometrical relations when the lens focused on the sample’s surfaces. The simultaneous determination of thickness, velocity, density and attenuation of thin stainless steel plate by using a point-focusing transducer with nominal frequency of around 50MHz were carried out. The determined material properties are comparable, in which the thickness, velocity and density can be measured with a percentage biases less than 5% and the attenuation is close to its real value. The present preliminary work shows the high efficiency, viability and capability of the new non-destructive technique in simultaneously characterize basic mechanical and geometrical properties of thin layers.