Autonomous Control of Non-Silicon Mems Flexible Micro-Assembly Line

Zhang Gaoyang,Jin Xin,Zhang Zhijing
DOI: https://doi.org/10.4028/www.scientific.net/amm.496-500.1468
2014-01-01
Applied Mechanics and Materials
Abstract:A wide range of micro-components can today be produced using various micro-fabrication techniques. The efficient high volume assembly of complex micro-systems consisting of vast single components (i.e., hybrid micro-systems) is, however, a difficult task that is seen to be a real challenge for the robotic research community. It is necessary to conceive flexible, highly precise and fast micro-assembly methods. In this paper, a frame of a micro-assembly system in the form of flexible micro-assembly line and its autonomous control is presented. Implementation of the control system are described and the procedure of autonomous control is described as well.
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