A High Temperature Capacitive Pressure Sensor Based On Alumina Ceramic For In Situ Measurement At 600 C

Qiulin Tan,Chen Li,Jijun Xiong,Pinggang Jia,Wendong Zhang,Jun Liu,Chenyang Xue,Yingping Hong,Zhong Ren,Tao Luo

DOI: https://doi.org/10.3390/s140202417

IF: 3.9

2014-01-01

Sensors

Abstract:In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 degrees C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 degrees C, limited by the sensor test setup. At 600 degrees C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.