Microstructure and Magnetic Properties of Micro Nife Alloy Arrays for Mems Application

Zhongliang Li,Xuming Sun,Yang Zheng,Haixia Zhang
DOI: https://doi.org/10.1088/0960-1317/23/8/085013
2013-01-01
Journal of Micromechanics and Microengineering
Abstract:NiFe alloy arrays with various geometry sizes and shapes were designed, fabricated and investigated. Electrodeposition was introduced as a highly effective integrated method to fabricate the alloy film. The influence of dimensional size and geometry shape of the array unit was discussed. With decreasing size, the soft magnetic properties of the samples are improved with a 78.6% decrease of coercivity and an 65.0% decrease of squareness ratio. Compared with square and rectangular arrays, circular arrays exhibit smaller coercivity, higher permeability and smaller squareness ratio. Additionally, different compositional arrays were also tested for their crystal structures. It is found that the alloy with a content of Ni80Fe20 can achieve a face-centered cubic structure and realize the best soft magnetic properties. A coercivity of 0.383 Oe, a squareness ratio of 4.21 x 10(-4) and a saturation magnetization of 4.2 T have been successfully achieved in circular arrays within an area of 2000 x 2000 mu m(2).
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