Abstract:With the rapid development of key industries such as new energy vehicles, smart homes, smart phones and consumer grade drones, the demand for high performance miniature micro- pressure sensors is also growing promptly. At prssent, most of the pressure sensors of this type adopt a C-type structure, and the thickness of the sensitive diaphragm needs to be continuously thinned in order to improve the sensitivity of this type sensor, which leads to its sensitivity to etching errors and makes it difficult to ensure the linearity of the pressure sensor. Based on this, we designed a miniature micro-pressure half active Wheatstone bridge piezoresistive pressure sensor with C-type square diaphragm structure, whose area is reduced by shortening the number of leads and pads, through ion impantation on the surface of the diaphragm to create a piezoresistors, using deep reactive ion etching (DRIE) technology to release the pressure sensitive diaphragm with length of 460 μm × 460 μm, thinkness of 7.5 μm. The buried oxygen layer in the SOI(silicon on insulator) can play a role of stopping the etching, which assures the uniformity of the released sensitive diaphragm and the non-linear errors of the sensor while maintains its sensitivity. In this paper, the influence of piezoresistor position offset on the performance of the pressure sensor is analyzed by means of simulation, which improves the accuracy of the designed model and guarantees its performance parameters can meet the design indicators. Finally, the static characteristics of the sensor is calibrated. The experimental results show that the sensitivity of the sensor is up to 0.538 mV kPa-1/3.5 V in the range of 40 kPa at room temperature, and the non-linear error is only 0.386 % FS. This study provides some new ideas and references for the design work of high performance micro-pressure sensors.

A Micro-Pressure Sensor with High Sensitivity and Overload Resistance

Absolute Micro Pressure Measurements Based on a High-Overload-resistance Sensor

Realization of a Micro Pressure Sensor with High Sensitivity and Overload by Introducing Beams and Islands

Incorporation of Beams into Bossed Diaphragm for a High Sensitivity and Overload Micro Pressure Sensor

The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor.

Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure

A High Sensitive Pressure Sensor with the Novel Bossed Diaphragm Combined with Peninsula-Island Structure

Design Optimization of A High-Sensitive Absolute Micro-Pressure Sensor

A piezoresistive pressure sensor with improved sensitivity in low pressure condition

A Novel Pressure Microsensor with 30- $\mu \Hbox{m}$-Thick Diaphragm and Meander-Shaped Piezoresistors Partially Distributed on High-Stress Bulk Silicon Region

Configuration Improvement for Micropressure Sensor with Vibration Interference

A high pressure sensor with circular diaphragm based on MEMS technology

Micro Piezoresistive Pressure Sensor

A Micromachined Resonant Micro-Pressure Sensor

Design and optimization of a micro piezoresistive pressure sensor

High-Pressure Sensor With High Sensitivity and High Accuracy for Full Ocean Depth Measurements

A bossed diaphragm piezoresistive pressure sensor with a peninsula–island structure for the ultra-low-pressure range with high sensitivity

Piezoresistive Pressure Sensors for Harsh Environments

Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity

A novel pressure sensor design for low pressure ranges