Design and implementation of an off-axis aspheric mirror structured reflectance difference spectrometer for in-situ vacuum application

徐臻圆,傅星,张一帆,谢鹏飞,胡春光,胡小唐
DOI: https://doi.org/10.16136/j.joel.2013.10.011
2013-01-01
Abstract:Rotating-compensator based reflectance difference spectroscopy (RC-RDS) is a versatile tool, which allows an RD spectrum at one time within several seconds and offers a sub-monolayer resolution for surface optical characterization. Thereby it is suitable for in-situ application. But there are many problems for the RC-RDS based in-situ measurement in the vacuum environment, i. e., the restrictions on the working space, the measuring distance from the front of the optical head to the sample, the beam size on the sample, the spectrum range, and the optical transparency of the total system. A new design for the optical head to overcome these problems is proposed, where an off-axis parabolic mirror is adopted for adjusting the beam in a compact and effective way. For the new optical head, a working distance of more than 50 cm, a focused beam size on the sample of less than 6.5 mm in diameter, and a spectral range of 280-825 nm are achieved. An experiment for monitoring the RD spectra of a Cu(110) sample in ultra-high vacuum environment was performed during an annealing process. And the evolution of the RD signal was perfectly recorded in a set of 512 spectra. The results with a measurement precision of 3×10-4 indicate the good performance of the new design for the vacuum application.
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