Abstract:Microscale resonators are fundamental and necessary building blocks for modern radio communication filters for mobile devices. The resonator's Q factor ($Q$) determines the insertion loss while coupling ($K_t^2$) governs the fractional bandwidth. The product $k_t^2 \times Q$ is widely recognized as the definitive figure of merit for microresonators. Magnetostatic wave resonators based on Yttrium Iron Garnet (YIG) are a promising technology platform for future communication filters. They have shown considerably better performance in terms of $Q$ when compared to the commercially successful acoustic resonators in the $>$7 GHz range. However, the coupling coefficients of these resonators have been limited to $<$3 %, primarily due to the restricted design space imposed by microfabrication challenges related to the patterning of gadolinium gallium garnet (GGG), the substrate material used for growing single crystal YIG. This paper reports novel resonator designs enabled by breakthrough bulk micromachining technology for anisotropic etching of GGG, leading to coupling >8 % in the 6-20 GHz frequency range. We use the same technology platform to show resonant enhancement of effective coupling, reaching up to 23 \% at 10.5 GHz. The frequency of resonant coupling can be tuned by design during the fabrication process. The resonant coupling results in an unprecedented $k_t^2 \times Q$ figure of merit of 191 at 10.5 GHz and 222 at 14.7 GHz. The technology platform presented in this paper supports both tunable filter architecture and switched filter banks that are currently being used in consumer mobile devices.

Low-Loss Magnetically Tunable Bandpass Filters with YIG Films

A Compact and Low-Loss Tunable Bandpass Filter Using YIG/GGG Film Structures

Tunable Bandpass Filter Using Partially Magnetized Ferrites with High Power Handling Capability

A Magnetically Tunable Bandpass Filter with High Out-of-Band Suppression

Dual H- and E-field tunable multiferroic bandpass filters with yttrium iron garnet film

Design of a Miniaturized Dual-Band Double-Folded Substrate Integrated Waveguide Bandpass Filter with Controllable Bandwidths

Active Tuning of A Microstrip Hairpin-Line Microwave Bandpass Filter on A Polycrystalline Yttrium Iron Garnet Substrate Using Small Magnetic Fields

High Selectivity and Compact Tunable Bandpass Filter Using YIG Material

An Edge-Coupled Magnetostatic Bandpass Filter

Y-type hexagonal ferrite-based band-pass filter with dual magnetic and electric field tunability

A Wide-Band Magnetic Tunable Bandstop Filter Prototype with Fegab/Al2o3 Multilayer Films

Dual H- and E-Field Tunable Multiferroic Bandpass Filter at ${\rm K}_{U}$-Band Using Partially Magnetized Spinel Ferrites

High-performance magnetostatic wave resonators through deep anisotropic etching of GGG substrates

Independently Tunable Compact Dual-Band Bandpass Filter with High Selectivity and Wide Stopband Using Multilayer Folded Dual-Mode SIDGS Resonator

Low-damping Flexible Y3Fe5O12 Thin Films for Tunable RF/microwave Processors

Compact and Low Loss Phase Shifter with Low Bias Field Using Partially Magnetized Ferrite

Compact Bandpass Filter with Wide Stopband and Low Radiation Loss Using Substrate Integrated Defected Ground Structure

Voltage Tunable Low Damping YIG/PMN-PT Multiferroic Heterostructure for Low-Power RF/microwave Devices

Integrated non-reciprocal dual H- and E-Field tunable bandpass filter with ultra-wideband isolation

A Narrow‐band High‐temperature Superconducting Filter with Wide Upper Stopband

Tunable Rf Band-Pass Filters Based on Nems Magnetoelectric Resonators