Analysis and test of vibration isolation performance for a novel permanent magnet vibration isolator

Qiang LI,Deng-feng XU,Xin FAN,Hao LIU
DOI: https://doi.org/10.3969/j.issn.1000-3835.2013.13.002
2013-01-01
Abstract:Vibration isolator is a key component to suppress undesirable vibrations in optical tests, semiconductor manufacturing and precise measurements. It can isolate disturbances coming from a mechanical device itself or an external source. With the rapid development of the significantly enhanced properties of rare-earth permanent magnets, studying a vibration isolator characterized by a strong magneto-elastic force becomes a hot topic in recent years. More and more engineers and researchers are attracted to develop a type of novel magnetic suspension vibration isolator. Here, a new type of permanent magnet vibration isolator was proposed. Then, a parametric analysis for the isolator based on an analytical model of axial magnetic force and stiffness was performed. The sizes of magnetic rings were determined. The vibration isolation performance of the isolator was analyzed. The results showed that it is possible to realize low-frequency vibration isolation when the isolator reaches the maximum load bearing capacity with the lowest axial stiffness in theory. Finally, for a permanent magnet vibration isolator, its vibration isolation test table was constructed. The dynamic characteristics of the isolator were calculated and tested, respectively. The results indicated that there is a good agreement between calculation and test results; the isolator can realize low-frequency vibration isolation with its maximum load bearing capacity.
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