Job families scheduling for non-identical parallel machines with setup time constraints

Gang-zhi ZHANG,Bing-hai ZHOU
DOI: https://doi.org/10.13196/j.cims.2013.12.zhanggangzhi.3162.8.20131229
2013-01-01
Abstract:In semiconductor manufacturing processes, the relevant parameters of equipment was adjusted to improve the high wafer quality and increase the setup time, which leaded to delay on production cycle time. To solve these problems, a multi-job families scheduling method of non-identical parallel machines was explored with setup time constraints. On the basis of describing a scheduling problem domain, a balance point between the number of setups and the number of parameter adjustments was explored to achieve the objective of minimum system Makespan. The corresponding mathematical programming model was built. A modified polymorphic ant colony algorithm was structured to solve the scheduling problem. Simulation experiments results showed that the developed algorithm was valid and feasible.
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