Abstract:We present and demonstrate a MEMS-based tunable terahertz metamaterial (TTM) composed of inner triadius and outer electric split-ring resonator (eSRR) structures. With the aim to explore the electromagnetic responses of TTM device, different geometrical parameters are compared and discussed to optimize the suitable TTM design, including the length, radius, and height of TTM device. The height of triadius structure could be changed by using MEMS technique to perform active tunability. TTM shows the polarization-dependent and electromagnetic induced transparency (EIT) characteristics owing to the eSRR configuration. The electromagnetic responses of TTM exhibit tunable characteristics in resonance, polarization-dependent, and electromagnetically induced transparency (EIT). By properly tailoring the length and height of the inner triadius structure and the radius of the outer eSRR structure, the corresponding resonance tuning range reaches 0.32 THz. In addition to the above optical characteristics of TTM, we further investigate its potential application in a refraction index sensor. TTM is exposed on the surrounding ambient with different refraction indexes. The corresponding key sensing performances, such as figure of merit (FOM), sensitivity (S), and quality factor (Q-factor) values, are calculated and discussed, respectively. The calculated sensitivity of TTM is 0.379 THz/RIU, while the average values of Q-factor and FOM are 66.01 and 63.83, respectively. These characteristics indicate that the presented MEMS-based TTM device could be widely used in tunable filters, perfect absorbers, high-efficient environmental sensors, and optical switches applications for THz-wave optoelectronics.

Microfluidic tunable metamaterial for gigahertz filter array

An absorptive filter using microfluidic switchable metamaterials

TUNABLE METAMATERIALS MADE OF GRAPHENE-LIQUID CRYSTAL MULTILAYERS

Flexible and stackable terahertz metamaterials via silver-nanoparticle inkjet printing

A Tunable All-Fiber Filter Based on Microfiber Loop Resonator

Terahertz Response of Microfluidic-Jetted Three-Dimensional Flexible Metamaterials

Tunable Terahertz Filter Based on Alternative Liquid Crystal Layers and Metallic Slats

Liquid Metal-Based Microfluidic Metasurface for Controllable Electromagnetic Wave Reflection Attenuation

Tunable fluid-solid metamaterials for manipulation of elastic wave propagation in broad frequency range

Electrically tunable terahertz metamaterials with embedded large-area transparent thin-film transistor arrays

Tunable Terahertz Metamaterial with Electromagnetically Induced Transparency Characteristic for Sensing Application

Non-polarized and Ultra-Narrow Band Filter in MIR Based on Multilayer Metasurface

Liquid Crystal Embedded Dielectric Metalens for Active Focal Length Tuning at the Microwave Range

Simulation Study on Tunable Terahertz Bandpass Filter Based on Metal–Silicon–Metal Metasurface

Metamaterial High Pass Filter Based on Periodic Wire Arrays of Multiwalled Carbon Nanotubes

Voltage Controllable Metamaterials Infiltrated by Liquid Crystal

Design of Tunable Dual-Band Terahertz Metamaterial Absorber With Liquid Crystal Integrated On-Chip

Magnetically tunable terahertz all-dielectric metamaterial based on liquid crystal

Liquid Crystal Enables Extraordinarily Precise Tunability for a High‐Q Ultra‐Narrowband Filter Based on a Quasi‐BIC Metasurface

Design, fabrication, and spectral characterization of temperature-dependent liquid crystal-based metamaterial to tune dielectric metasurface resonances

Performance analysis and prediction of tunable metasurface filter based on electrochemical metallization