Abstract:In this paper, an orthogonal type two-axis Lloyd's mirror interference lithography technique was employed to fabricate two-dimensional planar scale gratings for surface encoder application. The two-axis Lloyd's mirror interferometer is composed of a substrate and two reflective mirrors (X- and Y-mirrors), which are placed edge by edge perpendicularly. An expanded and collimated beam was divided into three beams by this interferometer, a direct beam and two reflected beams, projected onto the substrate, X- and Y-mirrors, respectively. The unexpected beam sections having twice reflected off the mirrors were blocked by a filter. The remaining two reflected beams interfered with the direct beam on the substrate, generating perpendicularly cross patterns thus forming two-dimensional scale gratings. However, the two reflected beams undesirably interfere with each other and generate a grating pattern along 45-degree direction against the two orthogonal direction, which influence the pattern uniformity. Though an undesired grating pattern can be eliminated by polarization modulation with introduction of waveplates, spatial configuration of waveplates inevitably downsized the eventual grating, which is a key parameter for grating interferometry application. For solving this problem, theoretical and experimental study was carefully carried out to evaluate the fabrication quality with and without polarization modulation. Two-dimensional scale gratings with a 1 m period in X- and Y-directions were achieved by using the constructed experiment system with a 442 nm He-Cd laser source. Atomic force microscopy (AFM) images and the result of diffraction performances demonstrated that the orthogonal type two-axis Lloyd's mirror interferometer can stand a small order undesired interference, that is, a degree of orthogonality between two reflected beams, denoted by , no larger than a nominal value of 0.1.

Fabrication of diffraction gratings for surface encoders by using a Lloyd's mirror interferometer with a 405 nm laser diode

Fabrication of Scale Gratings for Surface Encoders by Using Laser Interference Lithography with 405 Nm Laser Diodes

Analysis of a Lloyd's Mirror Interferometer for Fabrication of Gratings

Fabrication of a Two-Dimensional Diffraction Grating by a Two-Axis Lloyd's Mirror Interferometer

Design and Testing of a Compact Non-Orthogonal Two-Axis Lloyd's Mirror Interferometer for Fabrication of Large-Area Two-Dimensional Scale Gratings

Holographic Fabrication of Two-Dimensional Scale Gratings for Surface Encoder by Using an Orthogonal Type Two-Axis Lloyd's Mirror Interference Lithography

A Blu-Ray Laser Diode Based Dual-Beam Interference Lithography for Fabrication of Diffraction Gratings for Surface Encoders

Optimization and Fabrication of Chromium Grating in Self-Traceable Interferometer

Low-cost lithography for fabrication of one-dimensional diffraction gratings by using laser diodes

An Orthogonal Type Two-Axis Lloyd'S Mirror For Holographic Fabrication Of Two-Dimensional Planar Scale Gratings With Large Area

A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings

Fabrication of Large Grating by Monitoring the Latent Fringe Pattern

2510 Laser Interference Lithography with a Modified Two-Axis Lloyd's Mirror Interferometer for Fabrication of Two-Dimensional Micro Patterns

198 Laser Interference Lithography of Gratings for a Surface Encoder

A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers

Holographic fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoder

Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System

Fabrication of Optical Mosaic Gratings by Consecutive Holographic Exposures Employing A Latent-Fringe Based Alignment Technique

Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography

Investigation on the Three-Dimensional Light Intensity Distribution of the Fringe Patterns Generated by a Modified Two-Axis Lloyd's Mirror Interferometer

Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror