Abstract:Microring resonator is a original integrated optics device, which has developed for several years. Being a basic elements, microring resonator coulpled to a waveguide vertically offers high-quality factors, in large scale photoelectric integrated circuits, it can be used as filters, multiplexers, modulators, lasers and etc. This component has promising application in wavelength-division multiplexing(WDM) system because of their (simple) structure, easier fabrication and compactness.Most of the microring resonator devices have been fabricated using semiconductor material. In this work, we use polymer to fabricate microring device, polymer has a number of advantages over semiconductor-based devices, the first one is to deduce loss, the use of low refractive index polymers will significantly reduce scattering loss, the second advantage is to provide better coupling efficiency to optical fibers than previously de-(monstrated) semiconductor waveguides due to the low index and the large cross section of the polymer waveguide. Polymer materials also have other properties such like the excellent photoelectric characteristics, lower cost and simpler fabrication. The structure and working principle of microring resonant wavelength multiplexers (MRRWM) and device design are discussed. In microring resonators, the coupling coefficient plays an important role in determining the device characteristics. The coupling coefficient depends exponentially on the gap distance between the ring and the straight waveguide. We analyzed the transmission characteristics, designed a 8 channels microring (resonant) wavelength multiplexer(MRRWM), the central wavelength of MRRWM is 1.55 μm, the wavelength spacing is 1.6 nm. To fabricate polymer waveguide in microring devices, the reactive ion etching (RIE) technique was used.The single channel and 8 channel polymer MRRWM with polymers based on silicon are fabricated. In the optical measurement, we used a tunable semiconductor laser with a tuning range from 1 530 nm to 1 610 nm, a digital optical power meter, and an optical spectrum analyzer were used to analyze the optical characters. A fiber-waveguide precision alignment system with infrared CCD camera was used for light coupling. In conclusion, polymer microring resonators were successfully fabricated by RIE technique, their optical (characters) were optimazed and analyzed.

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