The Research on a Physical Model and an Analytical Method of Scatter Signal in X-ray Profile Gauge

Xian-fei WEN,Zai-zhe YIN,Ji-chen MIAO
DOI: https://doi.org/10.3969/j.issn.0258-0934.2012.06.002
2012-01-01
Abstract:There are more active researches on X-ray profile gauge with some useful properties including being more adaptive to harsh workplace and more precise when compared to other profile gauges. However, Scatter is a factor that degrades the measurement precision of X-ray profile gauge, the study about scatter correction is an indispensable step for the technology. We take an analytical method to correct it after making a physical model. The results obtained by this approach agree well with those using Monte Carlo simulation.
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