Abstract:Scanning electron microscopy is applied for tomographic imaging of ferroelectric domain walls. The position, orientation, and charge state of otherwise hidden walls are reconstructed, and a model is derived linking measured intensity variations to local domain‐wall properties. The approach facilitates high‐throughput screening of materials with functional domain walls, enabling monitoring during the production of devices and quality control in real‐time. Extraordinary physical properties arise at polar interfaces in oxide materials, including the emergence of 2D electron gases, sheet‐superconductivity, and multiferroicity. A special type of polar interface is ferroelectric domain walls, where electronic reconstruction phenomena can be driven by bound charges. Great progress has been achieved in the characterization of such domain walls and, over the last decade, their potential for next‐generation nanotechnology has become clear. Established tomography techniques, however, are either destructive or offer insufficient spatial resolution, creating a pressing demand for 3D imaging compatible with future fabrication processes. Here, non‐destructive tomographic imaging of ferroelectric domain walls is demonstrated using secondary electrons. Utilizing conventional scanning electron microscopy (SEM), the position, orientation, and charge state of hidden domain walls are reconstructed at distances up to several hundreds of nanometers away from the surface. A mathematical model is derived that links the SEM intensity variations at the surface to the local domain wall properties, enabling non‐destructive tomography with good noise tolerance on the timescale of seconds. The SEM‐based approach facilitates high‐throughput screening of materials with functional domain walls and domain‐wall‐based devices, which is essential for monitoring during the production of device architectures and quality control in real‐time.

Scanning Secondary-Electron Microscopy on Ferroelectric Domains and Domain Walls in Ymno3

Disparity Of Secondary Electron Emission In Ferroelectric Domains Of Ymno3

Three-dimensional domain identification in a single hexagonal manganite nanocrystal

Electron Beam‐induced Dynamic Evolution of Vortex Domains and Domain Walls in Single Crystalline YMnO3

Conductivity contrast and tunneling charge transport in the vortex-like ferroelectric domain patterns of multiferroic hexagonal YMnO3

Scanning Transmission Electron Microscopy Imaging of 180° Ferroelectric Domains and Application to Ca0.28Ba0.72Nb2O6 Single Crystals

Electrostatic topology of ferroelectric domains in YMnO$_3$

Direct Observation of Multiferroic Vortex Domains in YMnO 3

Imaging and structure analysis of ferroelectric domains, domain walls, and vortices by scanning electron diffraction

Direct Atomic-Scale Visualization of the 90° Domain Walls and Their Migrations in Hf0.5Zr0.5O2 Ferroelectric Thin Films

Non‐Destructive Tomographic Nanoscale Imaging of Ferroelectric Domain Walls

Scanning Probe Microscopy Study of the Domain Growth in Relaxor Ferroelectrics

Preparation of Epitaxial Hexagonal YMnO3 Thin Films and Observation of Ferroelectric Vortex Domains

Atomic-Scale Scanning of Domain Network in the Ferroelectric HfO2 Thin Film

Competition between Ferroelectric and Ferroelastic Domain Wall Dynamics during Local Switching in Rhombohedral PMN-PT Single Crystals

Direct Observation of Interlocked Domain Walls in Hexagonal Rmno3 (R = Tm, Lu)

Non-destructive tomographic nanoscale imaging of ferroelectric domain walls

Delineating complex ferroelectric domain structures via second harmonic generation spectral imaging

Watching domains grow: In-situ studies of polarization switching by combined scanning probe and scanning transmission electron microscopy

Nondestructive Imaging of Dielectric-Constant Profiles and Ferroelectric Domains with a Scanning-Tip Microwave Near-Field Microscope