Oxidation Behavior of Ti–B–C–N Coatings Deposited by Reactive Magnetron Sputtering
Xiangyang Chen,Shengli Ma,Kewei Xu,Paul K. Chu
DOI: https://doi.org/10.1016/j.vacuum.2012.03.001
IF: 4
2012-01-01
Vacuum
Abstract:Quaternary Ti-B-C-N coatings with different carbon concentrations are deposited on high-speed steel substrates by reactive magnetron sputtering. The oxidation behavior between 300 and 800 degrees C under ambient conditions is studied by scanning electron microscopy, high-resolution transmission electron microscopy, Vickers micro-hardness, and X-ray diffraction. The Ti-B-C-N coatings with smaller carbon contents have better oxidation resistance and the oxidation process can be divided into two stages: low-speed oxidation below 700 degrees C and high-speed oxidation above 700 degrees C. An oxidation mechanism is proposed to explain the relationship between the reaction with oxygen and observed oxidation behavior. (C) 2012 Elsevier Ltd. All rights reserved.
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