Sliding Mode Predictive Control of PSS Parallel Micro-Stage

Shen Hao,Wang Xin,Wang Jun
2012-01-01
Abstract:I n this paper a whole closed loop position feedback system is designed for a 3-axies parallel micro-stage to compensate the axis coupling error influence. By predicting the future sliding mode function value and combining feedback correction and receding horizon optimization approaches, a discrete-time sliding mode control law for tracking problem is constructed. With the designed control law, closed-loop systems have strong robustness to matched or unmatched uncertainties. Numerical simulations illustrate the validity of the proposed algorithm.
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