Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets

Tao, K.,Ding, G.,Wang, P.,Yang, Z.

DOI: https://doi.org/10.1109/MEMSYS.2012.6170413

2012-01-01

Abstract:This paper presents the fabrication and characterization of a novel fully integrated micro electromagnetic vibration energy harvester using micro-patterning of bonded magnets. The magnetic material utilized is a polymer composite, consisting of a commercially available NdFeB powder dispersed in epoxy resin to a weight loading percentage of 90%. The prototype is fabricated using UV-LIGA technology and microelectroplating technology. The whole volume of the structure is about 20 mm3. Testing results show that the fabricated vibration energy harvesters can generate a maximum peak-peak voltage of 20.9 μV at the device's resonance frequency of 365 Hz and input acceleration of 1 g (9.8 m/s2).