Modeling of a Novel Magnetometer with High Sensitivity and Low Power Consumption

LIU Yu-fei,ZHAO Ben-gang,WU Ya-ming,WANG Yue-lin
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.200
2006-01-01
Abstract:A novel MOEMS magnetometer was introduced, including MEMS torsional sensitive structure, magnetic film and optical detection. The theory about sensing and optical detect of the device was discussed l. The design of structure, analysis with ANSYS and Matlab, optimization of the device were showed. The performance of the device was simulated and analyzed. It shows that optical insertion loss signal can be received by dual fiber collimator and PIN, the magnetic induction 60nT could be detected and the sensitivity would be better than 0.6dB/ T.
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