Impedance analysis of PZT transducer by RMS method for thermosonic bonding
Zhi-Li LONG,Yun-xin WU,Lei HAN
DOI: https://doi.org/10.3969/j.issn.1000-310X.2005.04.003
IF: 3.614
2005-01-01
Applied Acoustics
Abstract:In thermosonic chip bonding process, the impedance of PZT transducer is a very important parameter. By getting the real part of electrical signal, a RMS (Root Mean Square) calculation method was used to denote impedance changing of PZT transducer and reflected clearly the impedance characteristic of PZT in bonding process. The paper described in detail the experiment method and analysis result.
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