Abstract:A brief overview is given on several aspects of applications of the Monte Carlo (MC) simulation method to surface-related electron spectroscopy and microscopy. For the MC modeling of electron interaction with solids, the electron inelastic scattering cross section is calculated by the use of bulk dielectric function with optical constants in a dielectric functional approach. This has enabled the systematic reproductions of the experimental energy distributions of backscattered electrons for a number of elemental materials. An improved calculation of backscattering factor for quantitative AES analysis has been performed on the basis of a new definition and by making use of the up-to-date relevant cross sections. The physical reason is given for the backscattering factor that can be less than unity for very low primary energies close to the ionization energy and/or for large incident angles. For the MC modeling of electron interaction with surfaces, the inelastic scattering of electrons moving in a surface region is treated in a self-energy formalism. The model has enabled the evaluation of the surface excitation effect through the calculation of position-dependent electron IMFP. A simulation of REELS spectra for Ag is compared with an experiment; a reasonable agreement found on the surface plasmon peak intensity normalized with elastic peak intensity thus verifies this modeling of electron interaction with surfaces. Finally, the MC simulation code has been extended to deal with complex sample geometries. By using basic building blocks to construct a complex geometry and the ray-tracing technique for correction of electron flight-step-length sampling, the structured and/or inhomogeneous sample can be modeled with reasonable flexibility. Copyright (C) 2006 John Wiley & Sons, Ltd.

Monte-Carlo Simulation for Electron-Neutral Collision Processes in Normal and Abnormal Discharge Cathode Sheath Region

Numerical-Studies On Charged-Particle Behavior In A Cathode Sheath Of Normal And Abnormal Glow Dc Discharge

Electron Transport Behavior in Normal and Abnormal Direct Current Discharge Cathode Sheath

Theoretical Investigation of Electron-Neutral Atom Collision Process and Electron Transport Parameters in Dc Glow Discharge of Plasma with A Transverse Magnetic Field

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Electron Energy And Angular Distribution Of Electrons In A Helium Dc Glow Discharge Cathode Sheath With Transverse Magnetic Fields

Particle-in-cell and Monte Carlo Collision Simulations of the Cathode Sheath in an Atmospheric Direct-Current Arc Discharge

Studies on Plasma Transport Processes in the Cathode Sheath of Atmospheric Direct-Current Arc Discharge with Particle-in-cell and Monte Carlo Collision Simulation

Monte Carlo Simulation of Mirror Magnetic Field Effects in a Helium Direct Current Gas Discharge

Electron diffusion in a non-uniform electric field and a uniform magnetic field

Compensated Monte Carlo Collision Model for Particle-In-Cell Simulation in High-Pressure Plasmas

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Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas

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Compensated particle in cell-Monte Carlo collision model with wide time step limit

Electron Transport Behavior in a Mirror Magnetic Field and a Uniform Electric Field

Monte Carlo simulation for electron Near Wall Conductivity in Hall Thrusters

Energy and Mass Transport Properties in the Near-Cathode Region of Atmospheric Thermal Plasma

Monte Carlo Simulation Study of Electron Interaction with Solids and Surfaces