Wavelets and Their Applications for Surface Metrology

X. Jiang,P. Scott,D. Whitehouse
DOI: https://doi.org/10.1016/j.cirp.2008.03.110
IF: 4.482
2008-01-01
CIRP Annals
Abstract:This paper presents three generations of wavelet representations that are designed for micro/nano-scale surfaces. These wavelets include a basic biorthogonal wavelet (for the establishment of a surface filtering equation), an evolutionary lifting wavelet (for surface oriented frequency analysis, surface recognition and reconstruction with nano-scale accuracy) and a complex wavelet (for surface morphological feature extraction). The benefits of using these wavelets in the subject area will be demonstrated throughout as follows (1) their metrology properties: the linear phase, finite impulse filtering, simplicity and naturalness, shift-invariance and direction sensitivity; (2) practical applications in surface measurement denoising, feature extraction for engineering and bioengineering surfaces.
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