The Control Technology and Experimental Study on 2-D Precise Scanning Stage Based on BP Neural Network Method

刘梅,李玉和,郑静琳,林浩山
DOI: https://doi.org/10.3969/j.issn.1003-5311.2008.11.022
2008-01-01
Abstract:The scanning system is one of the most important parts of the nano-measuring system,its capability influences on the main performance of the system.This paper introduces the structure of a 2-dimensions precise scanning stage that means the method mixed flexible hinge and piezoelectric control.It also gives a summary of BP neural network concepts,and the princi- ple of BP neural network method.The paper makes a modeling using BP neural network method to realize the control on scan- ner.The experiment presented in the end shows that the model- ing matches the actual results perfectly.
What problem does this paper attempt to address?