Abstract:Micro and Nano-technologies need precision machines that can produce motion accuracy down to micro/nano-meter range. At the same time, these machines have to operate at high speeds to yield high productivity. Such an increasingly tight control performance requirement puts a significant challenge to control community and forces control engineers to look beyond traditional linear control theory for more advanced nonlinear controllers. This research is to present an advanced nonlinear adaptive robust control approach to achieve micro/nanometer level positioning accuracy for micro/nano-manipulation type applications. In addition, the proposed control strategy is implemented on a commercial linear motor drive system with a position measurement resolution of 20 nanometers by an external laser interferometer. Experimental results for both long-range high-speed/high-acceleration motions and short-range slow motions are presented to demonstrate the precision motion that can be achieved by the proposed method and various practical issues that remain to be solved. It is found that for motions with a maximum speed of 2 m/sec and maximum acceleration of 45 m/sec2, the steady state position tracking error is within the linear encoder resolution of 0.5 μm when the system comes to a stop and within 5 μm during the 2 m/sec constant speed period. Furthermore, the maximal position tracking during the entire motion is mostly within 20μm. For slow motions with a maximal speed of only 0.0002m/sec, the steady state position tracking error with the external laser interferometer position measurement is mostly within 0.1 μm when the system comes to a stop and within 0.2 μm during the constant low speed period, and the maximal position tracking during the entire motion is within 2μm.

Barcode-based Position Control Servo for High-Speed Conditions

Robust Control of High Speed High Precision Linear Motion System

The generalized pulse code modulation pneumatic servo system and its control

High Resolution Digital Velocity Detection and Dynamic Position Detection Methods

Research on position compensation and velocity estimation method of servo system based on limited precision encoder

A New Linear Interpolation Method with Lookahead for High Speed Machining

A Control Method for Tracking Large Position Deviation Signal Fast and Smoothly

Development of Novel Magnetic Encoder and Vector Control Method for Servo Control of High-Speed Motor

High-precision magnetic encoder module design based on real-time error compensation algorithm

High precision embedded control of a high acceleration positioning system

Fast and High Precision Positioning Control of High-Speed Motors

Input revising feedforward error compensation control of the high speed precision servo systems

Visual servoing control for robot-assisted micro-invasive surgery systems based on optical positioning

Vector Control of High Speed PMSM Based on Single-Pole Magnetic Encoder

A Dual-Loop Position Servo System Based on Position and Speed Parallel Control Structure.

Design and Testing of a Nanometer Positioning System

Modeling Method for Position Control of Full Digital AC Servo Systems

High-precision position control of belt drive system based on OPC communication

Precision Motion Control of Linear Motor Drive Systems for Micro/Nano-Positioning

Tracking and Synchronization Control for Multimotor Servo Systems Based on Fixed-Time Command Filtered Approach

Research on High-Speed Positioning of AC Servo System Based on Feedforward Control