A Disposable Ozone Sensor Based on a Grating-Coupled Glass Waveguide Coated with a Tapered Film of Copper Tetra-T-butylphthalocyanine

ZM Qi,HS Zhou,I Honma,K Itoh,H Yanangi
DOI: https://doi.org/10.1016/j.snb.2004.08.009
IF: 9.221
2004-01-01
Sensors and Actuators B Chemical
Abstract:An integrated optical sensor specifically sensitive to ozone has been developed by vacuum evaporating a tapered thin film of copper tetra-t-butylphthalocyanine (CuPct) through a mask onto a slab waveguide made by K+–Na+ ion-exchange in glass. A pair of photoresist gratings fabricated on the waveguide offer the sensor a good long-term stability in optical coupling. The evaporated dye film composed of CuPct H-aggregates has a large absorption at 633nm and a high-index of refraction relative to that of glass substrates. Therefore, the waveguiding mode excited with a 633nm laser beam in the CuPct film-coved waveguide is highly attenuated. The CuPct film is very stable in air but ozone exposure at room temperature can result in a rapid and irreversible decoloration of the film. In the presence of a given concentration of ozone in the ambient air about the senor, the output light intensity was detected to linearly increase with time. It has been demonstrated that the sensor containing a 15mm long and tens-of-nanometers thick dye film can detect 33ppb ozone in air at room temperature.
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