Thermal Pulse Measurements of Space Charge Distributions under an Applied Electric Field in Thin Films

Feihu Zheng,Chuandong Liu,Chen Lin,Zhenlian An,Qingquan Lei,Yewen Zhang
DOI: https://doi.org/10.1088/0957-0233/24/6/065603
2013-01-01
Abstract:The thermal pulse method is a powerful method to measure space charge and polarization distributions in thin dielectric films, but a complicated calibration procedure is necessary to obtain the real distribution. In addition, charge dynamic behaviour under an applied electric field cannot be observed by the classical thermal pulse method. In this work, an improved thermal pulse measuring system with a supplemental circuit for applying high voltage is proposed to realize the mapping of charge distribution in thin dielectric films under an applied field. The influence of the modified measuring system on the amplitude and phase of the thermal pulse response current are evaluated. Based on the new measuring system, an easy calibration approach is presented with some practical examples. The newly developed system can observe space charge evolution under an applied field, which would be very helpful in understanding space charge behaviour in thin films.
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