Abstract:This paper discusses the error analysis and optimization of a lateral deformable NEMS zeroth-order grating transducer based on an anomalous diffraction phenomenon, namely Wood's type anomaly, in which tiny changes in the displacement of the nanostructured grating elements lead to a dramatic increase or decrease of the optical reflection amplitude. With this special feature, this structure is ideal to measure very small displacement. However, parameters such as wavelength, period, duty ratio play very important roles in the performance of the device. In this paper, the performance of the structures with different parameter settings is analyzed and the original structure is optimized through 3-D Finite Difference Time Domain method (FDTD). Simulation demonstrates the new structure is of higher sensitivity, namely 0.705%/nm. Moreover, in order to enlarge the tiny size of the original structure which is closely related to the incident wavelength, the wavelength of incident light is changed into longer ones, e.g. 1053nm, 1310nm, and 1530nm. The calculation predicts the optimized structure corresponding to 1530nm not only has extinction ratio higher than the original one, namely 96% but also twice larger size, namely twice less strict demand for processing precision, which makes them possible to fabricate with current surface micromachining processing similar to that used for the fabrication of polysilicon MEMS. Besides, structures of several visible incident wavelengths, such as 532nm, 632.8nm, 670nm, and 753nm, are also analyzed and optimized, which gives great convenience to the installation and calibration of such device as well as observation of its performance. All the calculated data enables us to apply the structure into fields required for different sensitivities with different grating designs and thus broadens the further usage of such novel structure, as structures of different parameters are of different sensitivities and signal strengths. In addition, a tolerance analysis of the device in terms of fabrication, illumination, alignment is discussed in detail to get a guidance of successful realization of an actual device. Especially, during the analysis an unexpected performance of the device is discovered, in which the signal of the devices corresponding to 1530nm changes into pulse signal with slop of 2.292%/nm, i.e. 0.36dB/nm when the air gap is reduced to 300nm, indicating sensitivity over four times higher than that of the original one, namely 0.5%/nm, i.e. 0.04dB/nm.

Review of MEMS-based programmable gratings:Part Ⅱ

Design and Fabrication of Programmable Phase Grating Structures

Tolerance analysis and optimization of a lateral deformable NEMS zeroth-order gratings

Analysis and Optimization of a Novel Laterally Deformable Optical NEMS Grating Transducer

Technological Processes of Grating Light Valve As Diffractive Spatial Light Modulator in Laser Phototypesetting System

Optical Design and Analysis of a High Resolution MOEMS Accelerometer Based on Diffraction Grating

Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

MEMS Technology: A Review

Separation of glycosidic catiomers by TWIM-MS using CO2 as a drift gas.

Primary dentition unilateral crossbite in relation to functional lateralities.

MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

Programmable mechanical metamaterials: basic concepts, types, construction strategies—a review

A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers

State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

An Review of MEMS-based Microrelay Evolution and Its Key Issues

High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating

Micro/Nano Grating and Its Application to Moire Measurement

Review and Prospect on Reflection Mode Micro-Opto-electro-mechanical System

Optical-Electromechanical Performance of Mems Tilting Micro-Mirrors for Aon Communication System

Recent Progress on Imprinting Technologies and Applications of Photonic Crystal Fiber Long Period Gratings

Review of optical devices and systems based on microfluidics