Abstract:Since the advent of X-Ray fluorescence (XRF) spectrum analysis technology, with its wide range of elemental analysis, rapid, nondestructive analysis characteristics, and better detection accuracy, the workload of semi-quantitative analysis has taken half of the total analysis in contemporary research institutes and university laboratories engaged in material research. In addition, XRF has been widely and efficiently used in analytical chemistry, geological and mineral survey, ecological and environmental monitoring, food and drug detection, archeology and other fields. XRF spectrum processing technology is based on the application of mathematical principles, using reasonable algorithms to optimize the processing of spectrum data to contribute more accurate quantitative analysis of key elements. Over the years, XRF spectrum processing technology has formed a relatively complete set of processes, in each step of spectrum processing, plenty of research work and paper reports have been implemented and developed. This paper mainly reviews the representative algorithms and their progress in spectrum smoothing, background subtraction and overlapping peak decomposition of XRF spectrum analysis technology, analyzes their applications in related fields, summarizes and proposes the development direction of some potential algorithms.

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