Anisotropic Tixsn1-Xo2 Nanostructures Prepared by Magnetron Sputter Deposition

Shutian Chen,Zhengcao Li,Zhengjun Zhang
DOI: https://doi.org/10.1186/1556-276x-6-326
2011-01-01
Nanoscale Research Letters
Abstract:Regular arrays of TixSn1-xO2 nanoflakes were fabricated through glancing angle sputter deposition onto self-assembled close-packed arrays of 200-nm-diameter polystyrene spheres. The morphology of nanostructures could be controlled by simply adjusting the sputtering power of the Ti target. The reflectance measurements showed that the melon seed-shaped nanoflakes exhibited optimal properties of antireflection in the entire visible and ultraviolet region. In addition, we determined their anisotropic reflectance in the direction parallel to the surface of nanoflakes and perpendicular to it, arising from the anisotropic morphology.
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