Distorted Wave Approach to Diffuse Scattering in THEED and RHEED

SL DUDAREV,LM PENG,MJ WHELAN
DOI: https://doi.org/10.1016/0304-3991(93)90052-y
IF: 2.994
1993-01-01
Ultramicroscopy
Abstract:An approach based on the distorted wave approximation (DWA) is shown to be computationally efficient for evaluation of inelastic and diffuse scattering cross-sections both in transmission and reflection geometries of diffraction. Results of many-beam simulations of THEED and RHEED Kikuchi patterns are presented, and quantitative comparison is made between their intensity profiles. We conclude that quantitative information can hardly be retrieved from similarity of RHEED and THEED diffraction patterns; however, there exists a straightforward and relatively simple method which makes it easy to compute the RHEED inelastic scattering cross-section numerically.
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