Abstract:A piezoelectric-cantilever-type microvibration pickup sensor is presented.To design appropriate structure for concrete vibration conditions,the natural frequency and corresponding voltage signal output are calculated and analyzed by finite element method.MEMS technique is utilized to fabricate device prototypes and they are measured.The results indicate that the voltage outputs of the fabricated prototypes are over 200 mV under a low frequency harmonic excitation of 9.8 m/s2 acceleration.Due to the influence of the variance resulted from PZT film preparation and silicon wet etching,the testing results may be considered to be accordant with the simulation results,which lay valuable foundation for design and fabrication on high performance microvibration pickup sensors.

Design and Test of Piezoelectric Cantilever Structure for Microvibration Pickup Sensor