ARMA Modeling and Dynamic Process Control in IC Manufacturing

HUANG Wei,DOU Weizhi,LIU Daoguang,YAN Liren
2008-01-01
Abstract:The concept of dynamic process control was proposed,in which ARMA,one of self-adapting time series arithmetics,was used to analyze and forecast the result of an undergoing process step.Depending on the forecasted data,process parameters can be changed accordingly to improve the process batch-to-batch uniformity without any further cost on IC machines.The result also demonstrated that this soft method was one of the advanced process control ways.
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