DECOMPOSITION OF SF6 BY DIELECTRIC BARRIERS DISCHARGE

Yan SHEN,Li HUANG,Ren-xi ZHANG,Hui-qi HOU
DOI: https://doi.org/10.3321/j.issn:0254-6108.2007.03.001
IF: 4.236
2007-01-01
Environmental Chemistry
Abstract:The optimal parameters of the decomposition of SF6 were investigated by changing the reaction conditions of dielectric barriers discharge(DBD)such as the applied voltage,discharge time,initial pressure of SF6,and pressure of different additive gases(Ar,N2,O2,H2O,air).GC-TCD was used to quantitative determination of SF6.The results indicated that decomposition of SF6 can be improved by increasing applied voltage,prolonging discharge time,reducing the pressure of medium gas or mixing trifle amount of additive gases.Further study on discharging with air in different humidity demonstrated that the addition of 28.2 kPa air with a relative humidity of 51% can make the decomposition rate of 2.0 kPa SF6 up to 92%.SiF4,SF4,SOF2,SOF4,SO2F2 were detected by FT-IR as discharge by products.
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