Abstract:Terahertz (THz) wave manipulation, especially the beam deflection, plays an essential role in various applications, such as next-generation communication, space exploration, and high-resolution imaging. Current THz optical components and devices are hampered by their large bulk sizes and passive responses, limiting the development of high-performance, miniaturized THz microsystems. Tunable metasurfaces offer a powerful dynamic optical platform for controlling the propagation of electromagnetic waves. In this article, we presented a mechanically tunable metasurface (MTM), which can achieve terahertz beam deflection and vary the intensity of the anomalous reflected terahertz wave by changing the air gap between the metallic resonator (MR) array with phase discontinuities and Au ground plane. The absence of lossy spacer materials substantially enhances deflection efficiency. The device was fabricated by a combination of the surface and bulk-micromachining processes. The THz beam steering capability was characterized using terahertz time domain spectroscopy. When the air gap is 50 μm, the maximum deflection coefficient reaches 0.60 at 0.61 THz with a deflection angle of ~44.5°, consistent with theoretical predictions. We further established an electrically tunable miniaturized THz device for dynamic beam steering by introducing a micro voice coil motor to control the air gap continuously. It is shown that our designed MTM demonstrates a high modulation depth of deflection coefficient (~ 62.5%) in the target steered angle at the operating frequency. Our results showcase the potential of the proposed MTM as a platform for high-efficiency THz beam manipulation.

Optically Controlled High Temperature Superconductor Attenuator and the Influence of Laser Beam Offset on the Optical Resonding Property

Planar Tunable High-Temperature Superconductor Microwave Broadband Phase Shifter with Patterned Ferroelectric Thin Film

Polymer-Based Variable Optical Attenuator

Digitally Controlled Programmable High‐speed Variable Optical Attenuator

Linbo3 Based S-Bend Waveguide Variable Optical Attenuator

A Study of Thermal Effects in Superconducting Terahertz Modulator by Low Temperature Scanning Laser Microscope

Low Crosstalk 1/spl Times/2 Thermooptic Digital Optical Switch with Integrated S-bend Attenuator

Ultracompact Variable Optical Attenuator Based on Photonic Crystal Waveguide

Adaptive high temperature superconducting filters for interference rejection

A Power-Adjustable Superconducting Terahertz Source Utilizing Electrical Triggering Phase Transitions in Vanadium Dioxide

Thermal Gradient Driven Variable Optical Attenuator With On-Chip CNT Absorber

Spatially Resolved Analyses of Microwave and Intermodulation Current Flow Across HTS Resonator Using Low Temperature Laser Scanning Microscopy

Contributions of the Surface Resistance of High-Temperature Superconducting Films to the Insertion Loss of the Microwave Filters

Flexible Thermo-Optic Variable Attenuator based on Long-Range Surface Plasmon-Polariton Waveguides

Mechanism of A Variable Optical Attenuator Based on Guided Wave Resonance

Thermal tuning of terahertz metamaterial absorber properties based on VO 2

Design, Microfabrication, and Experiment of a Compact Mode Selection Filter for Sub-Terahertz Sheet Beam Traveling-Wave Tubes

Nonlinear Surface Resistance of YBa2Cu3O7-x Superconducting Thin Films on MgO Substrates in Dielectric Resonator at Ultra High Frequencies

High-Efficiency Dynamic Terahertz Deflector Utilizing a Mechanically Tunable Metasurface

A Narrow‐band High‐temperature Superconducting Filter with Wide Upper Stopband

Temperature-Controlled and Adjustable Terahertz Device Based on Vanadium Dioxide