SUBSTRATE-INDUCED POLYMER BLEND PHASE SEPARATION FOR PREPARING HIGHLY UNIFORM PATTERNS

白桦,巫国平,熊玉卿,张莉,郭云,常梦洁,张浩力
DOI: https://doi.org/10.3969/j.issn.1006-7086.2009.02.003
2009-01-01
Abstract:Substrate induced polymer blend phase separation is a new and attractive method for fabricating highly uniform polymer patterns. The factors affect the phase separation of PS/PVP blend on chemically patterned substrates was investigated. It was found that polymer film thickness plays a key role to the pattern quality. Dewetting occurred when the film thickness is relative thin (100 nm). When the film is too thick (300), the influence from the substrate becomes less effective. At the optimum thickness, around 140 nm in this work, the best pattern replication was observed. Another important factor is the periodicity of the chemical pattern. The best pattern replication took place when the period of the chemical pattern matches the intrinsic size of the polymer particles.
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