Principle and research development on planar Hall effect sensor

CHEN Xi-zhou,WANG Xue-feng,ZHANG Huai-wu,ZHONG Zhi-yong

DOI: https://doi.org/10.3969/j.issn.1001-3830.2011.03.002

2011-01-01

Abstract:Firstly,the principle of planar Hall effect(PHE) was briefly introduced,and then the recent development of planar Hall effect sensors was reviewed,including the size and shape change of sensor,material improvement,and preparation process etc.After that,several typical structures of PHE sensor were described,and the influence of some other factors such as temperature and film thickness on the sensor sensitivity was summarized.At the end,the existing problems and its developing prospects were discussed.