Wafer notch detecting device based on linear CCD

Ren Mingcan,Chen Dayue
DOI: https://doi.org/10.3969/j.issn.1002-7300.2007.08.039
2007-01-01
Abstract:There are some disadvantages of the method,based on laser diode and receiver,to detect the wafer notch,such as low mission success rate,long detecting time,complex machine structure and so on.In order to shorten the detecting time and improve the efficiency of the wafer transfer,a new method of detecting wafer notch is introduced,which is based on linear CCD.Compared to the method based on laser diode through experiments,the new method just needs half the time to detect a piece of wafer,avoids the detection failure which is caused by the deviation of canter point between the wafer and vacuum sucking disc,and then the mission success rate is more than 95%.At the same time,the new method just needs a rotary disc,which simplifies the machine structure.
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