Abstract:With the rapid development of the semiconductor industry, fault diagnosis is an important task in routine operations to determine the root cause for faults that occur. A tool in manufacturing processes is equipped with a wide variety of sensors that record different types of process data. Wafers being processed are accompanied by a considerable amount of process data as a multivariate time series. Identifying the key process parameters and the corresponding process operations where faults occur can be used to facilitate the tasks of monitoring the process, maintaining the stability of the process, and stabilizing wafer production yield. This article proposes a novel solution procedure for fault diagnosis of wafer acceptance test (WAT) and chip probing (CP) using machine learning (ML). Based on the process flow of wafers and the corresponding process data, a sampling method, called synthetic minority oversampling technique (SMOTE), is first used to augment classification models with an imbalanced process dataset, and the best-practice SMOTE ratio is sought by using four competitive classifiers. By means of principal component analysis (PCA), the original data are transformed into visualizations to explore the distributions of good and bad lots of wafers. Based on the comparison of the four classifiers used in the test, the proposed logistic regression with data augmentation (LR-SMOTE) performs best. The ten most important features identified by using the LR are collected to determine potential failure operations. The identified failures in operations returned by using the proposed solution procedure for fault diagnosis of WAT and CP were confirmed by the engineers who work in the domain. Note to Practitioners—In semiconductor manufacturing practice, during the WAT and CP, domain engineers need to trace upstream the key process parameters and the corresponding key operations in the front-end-of-line (FEOL) process if any faults are detected in the -ack-end-of-line (BEOL) process. In fact, the FEOL and the BEOL are located in completely separate plants with different clean room standards. Bridging the information gap between these two different processes merits thorough scrutiny. Another challenge posed by fault diagnosis of WAT and CP is that the total number of features (i.e., process parameters) involved in the FEOL can be tens of thousands, leading to an adverse effect of data sparsity on model building.

FAULT DETECTION FOR THE CLASS IMBALANCE PROBLEM IN SEMICONDUCTOR MANUFACTURING PROCESSES

Discriminative Feature Selection Based on Imbalance SVDD for Fault Detection of Semiconductor Manufacturing Processes.

Fault Detection Using Random Projections and k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

A Sequential Resampling Approach for Imbalanced Batch Process Fault Detection in Semiconductor Manufacturing

Fault diagnosis based on imbalance modified kernel Fisher discriminant analysis

Fault Diagnosis of Wafer Acceptance Test and Chip Probing Between Front-End-of-Line and Back-End-of-Line Processes

Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing

Ensemble Semi-Supervised Fisher Discriminant Analysis Model for Fault Classification in Industrial Processes

Fault Detection for Semiconductor Quality Control Based on Spark Using Data Mining Technology

Fault Detection Method Based On Artificial Immune System For Complicated Process

SVM-tree and SVM-forest Algorithms for Imbalanced Fault Classification in Industrial Processes

Alleviating Class-Imbalance Data of Semiconductor Equipment Anomaly Detection Study

Fault Diagnosis Based on Fuzzy Support Vector Machine with Parameter Tuning and Feature Selection

Sequential and Comprehensive Algorithm for Fault Detection in Semiconductor Sensors

Imbalanced Multifault Diagnosis via Improved Localized Feature Selection

A Local Adaptive Minority Selection and Oversampling Method for Class-Imbalanced Fault Diagnostics in Industrial Systems

An adaptive Copula function-based framework for fault detection in semiconductor wafer fabrication

Development of Fault Detection Systems Based on Big Data Ecosystem in Semiconductor Manufacturing: The Hadoop Ecosystem Implementation

Fault Detection Using Principal Components-Based Gaussian Mixture Model for Semiconductor Manufacturing Processes

Prediction of highly imbalanced semiconductor chip-level defects using uncertainty-based adaptive margin learning

A <scp>Multi‐Fault</scp> Diagnosis Method Based on Improved <scp>SMOTE</scp> for <scp>Class‐Imbalanced</scp> Data