Microendoscopic Confocal Imaging Probe Based on an LVD Microlens Scanner

Ankur Jain,Huikai Xie
DOI: https://doi.org/10.1109/JSTQE.2007.893112
IF: 4.9
2007-01-01
IEEE Journal of Selected Topics in Quantum Electronics
Abstract:This paper reports a microendoscopic confocal imaging probe based on a large-vertical-displacement (LVD) microlens scanner. Photoresist reflow technique is used to form a microlens on a lens holder that is integrated with a LVD microactuator. With a footprint of 3 mmtimes2 mm, the LVD microlens scanner can vertically displace the integrated polymer microlens by 0.7 mm at a dc voltage of 23 V. The ...
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