New Design of A Spectroscopic Ellipsometer by Using A Spectrometer with Multiple Gratings and A Two-Dimensional Ccd Array Detector

HY You,JH Jia,JK Chen,T Han,WM Ni,SY Wang,J Li,RJ Zhang,YM Yang,LY Chen,DW Lynch
DOI: https://doi.org/10.1016/j.tsf.2003.11.211
IF: 2.1
2004-01-01
Thin Solid Films
Abstract:A new type of CCD spectroscopic ellipsometer has been designed and constructed to study the optical properties of materials in the 500–1000 nm wavelength range. For the system, the analyzer is fixed, and the polarizer is driven 104 steps per revolution by a stepping motor having a hollow shaft. The spectrometer was designed by using a two-dimensional Si-based CCD array detector and an integrated grating consisting of three sub-gratings. This magnifies the wavelength range threefold with higher spectral resolution and data acquisition speed. The optical analysis and software problems were investigated and solved. The complex dielectric function of a gold film sample was measured with the result that is in agreement with that obtained by other methods based on the Drude model.
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